Recently
The provincial party committee and the provincial government held a provincial science and technology award conference
to commend the 2021 Provincial Science and Technology Award
Jiangsu Xinhua Semiconductor Technology Co., Ltd.
The innovation team headed by Dr. Tian Xin
With
"High purity for integrated circuits" Electronic grade polycrystalline silicon large-scale industrialization technology"
won the third prize of Provincial Science and Technology Award
This is also another important breakthrough of the Economic Development Zone in strategic emerging industries
Electronic grade polysilicon 2
is a national development integrated circuit As a strategic raw material for the industry, the production technology has been monopolized by foreign countries for a long time, which has become a bottleneck in the development of China's integrated circuit industry.
Jiangsu Xinhua Semiconductor Technology Co., Ltd. is a joint venture established by GCL Group leading photovoltaic enterprise GCL Technology Holdings Co., Ltd. and National Integrated Circuit Industry Investment Fund Co., Ltd. . Its business scope is mainly research and development, production and sales. Semiconductor grade polysilicon and other semiconductor raw materials and electrochemical products.
has a total investment of approximately 3.8 billion yuan, a production scale of 5,000 tons/year, and its production capacity ranks third in the world. This project is a winning bid for the Ministry of Industry and Information Technology’s 2016 Foundation Strengthening Project, a key project in Jiangsu Province, and a major Xuzhou City project.
After more than 6 years, Tian Xin led Xinhua Semiconductor to continuously overcome difficulties and break through technological barriers. It not only filled the gap in domestic semiconductor-grade raw material manufacturing, but also became an important force in promoting the localization of the semiconductor industry chain. It also allowed Xinhua Semiconductors are at the forefront of the industry and have become an important part of the global semiconductor materials industry chain.
Electronic grade polysilicon achieves mass production
As a leading enterprise in the research and development and production of polysilicon materials in China, GCL has accumulated nearly ten years of experience in this field.
Based on GCL GCL ultra-large-scale clean production technology of polysilicon and based on its own core technology system, Tian Xin led the team to eliminate the waste and retain the essence of existing foreign advanced technologies. After more than 3 years of technology integration and research and development, Independently constructed a closed-circuit cycle system of "distillation and purification, vapor deposition, by-product recycling, and automated product processing".
In this process, the team completed more than 600 improvements and innovations in core technologies and equipment, and finally formed an electronic-grade polysilicon production process with completely independent intellectual property rights. It is no longer controlled by others at the technical level, and its level is comparable to that of leading international companies.
achieved a breakthrough in production technology, but large-scale production lines are still a major problem facing Tian Xin and his team. Without equipment, Xinhua Semiconductor jointly developed with many domestic equipment manufacturers based on the introduction of foreign advanced technology concepts and semiconductor industry manufacturing standards.
- With an unyielding drive, the team and equipment manufacturers not only developed clean equipment and clean materials, making the equipment localization rate of the entire project more than 70%, but also continuously improved process technology, mastered a number of core technologies, and achieved Domestic related equipment has been developed from scratch, and has created the "first" in many industries.
- On this basis, Tian Xin led Xinhua Semiconductor to take the lead in building the first world-class 5,000 tons/year electronic-grade polysilicon production line in China. This is not only the domestic debut of large-scale industrialization of electronic-grade polysilicon, but also the key issues that have long plagued the mass production of high-purity electronic-grade polysilicon in my country, such as trace impurity purification, high-level cleanliness control, and full-process online quality monitoring. Crossing and breaking through .
- The high purity characteristics of the electronic grade polysilicon products produced by Xinhua Semiconductor have reached the highest level that can be achieved in current industrial purification. It has become the benchmark of domestic high-end electronic grade polysilicon, and has achieved 6-inch to 12-inch silicon wafers full coverage.
Integrated circuit raw materials are independently controllable
Electronic grade polysilicon is a key basic material for integrated circuits and the cornerstone of the electronic information industry. In the past, the Chinese market relied entirely on imports of electronic-grade polysilicon for integrated circuits. It is this sense of responsibility that has allowed Xinhua Semiconductor to undertake a number of national-level projects, successfully break through overseas technology blockades for many years, and fill the gap in domestic semiconductor-grade raw materials.
In May 2019, a cargo ship carrying high-purity silicon material for integrated circuits slowly sailed out of the port and headed for South Korea. On that day, Tian Xin, general manager of Jiangsu Xinhua Semiconductor Technology Co., Ltd. and deputy director of the GCL Group's Central Research Institute, was busy in his research and development position as usual, but his thoughts could not help but surge.
html After more than 11 years of , ,317 production trials, ,629 optimization and improvement of technologies and equipment, , relying on 0% of domestic equipment, , Xinhua Semiconductor finally Systematically solves the problem of impurity release from high-purity silicon materials used in integrated circuits An industry problem, the high-purity silicon materials produced for integrated circuits have passed a series of strict verifications and tests, and have been exported in small batches.
Judging from the quantity, the export of this batch of high-purity silicon materials does not seem surprising, but for the domestic semiconductor materials industry, which has long been stuck in the field of integrated circuits, Xinhua Semiconductor’s export is epoch-making. Significance -
not only broke through the technology of complete removal and impurity control at the raw material end, but also pioneered the world's first automated and non-contact silicon material processing system, becoming my country's first manufacturing company to export high-purity polysilicon for integrated circuits to the international market, marking As my country's electronic-grade polysilicon breaks through the overseas technology blockade for many years, it fills a gap in the national integrated circuit industry.
"Xinhua Semiconductor was established with a mission, which is to solve the situation where China's integrated circuit raw materials, electronic-grade polysilicon, are completely dependent on imports and controlled by others."
Tian Xin said that at that time, the technology of electronic-grade polysilicon materials was completely controlled in Germany and In the hands of Japan and other countries, domestic research in this field is almost blank. Unable to wait or wait, Tian Xin and the R&D team are facing an almost blank technical field.
Starting from scratch, Tian Xin led the team to lead the research and development through independent research and development and actively mobilized and introduced achievements in related fields such as intelligent manufacturing and advanced materials. Technologies such as trichlorosilane and ultra-trace impurity purification have solved the "stuck neck" technical problem that has long plagued my country's high-purity polysilicon field and achieved cornering overtaking of established foreign companies.
As the general person in charge of technology and technology, Tian Xin not only published many professional papers, but also holds 11 invention patents related to electronic grade polysilicon. He was awarded the title of Jiangsu Province Intelligent Manufacturing Expert, China IC Development Outstanding Young Scientist, and Xuzhou City Outstanding Science and Technology Enterprise He has also organized and led the team to undertake research on national and provincial high-precision vertical subjects for many times, achieving breakthroughs in multiple technical fields.
- 2016 National Ministry of Industry and Information Technology "Strong Foundation Project"
- 2018 Jiangsu Provincial Department of Science and Technology "Prospective Project"
- 2019 Jiangsu Provincial Department of Science and Technology "Core Technology Research"
- ... 1
Tian Xinhe and his team continue to make technological breakthroughs and innovations , which has consolidated Xinhua Semiconductor’s technical foundation in the field of electronic-grade polysilicon technology. As a result, Xinhua Semiconductor has taken one step at a time and gained a technological advantage over advanced foreign companies.
- In 2020, Xinhua Semiconductor won the title of "IC Unicorn Enterprise " issued by CCID Consulting, a subsidiary of the Ministry of Industry and Information Technology.
Manuscript: Jinlong Lake Express
