Munich, May 24, 2022 /PRNewswire/ -- ERS electronic, a leader in temperature management solutions for semiconductor manufacturing, has developed a temperature calibration device that allows for high accuracy (as low as 30mK) fully automatic measurements in the actual needle test area of the wafer. Currently, the device named ProbeSense™ is being filed for technical patents.
consists of a temperature sensor, and the ProbeSense™ installed at the probe card of the wafer probe table will follow the movement rules of the XYZ axis of the probe during wafer needle testing, and perform multi-point temperature measurement on the wafer surface while ensuring the same test environment. ProbeSense™ will be delivered with adapter boards to achieve compatibility with mainstream probe tables in the industry while meeting customer needs. In addition, the entire ProbeSense™ equipment includes a temperature measuring instrument whose accuracy has been pre-calibrated in the mk range with the temperature sensor.
In order to further realize full automation of the measurement process without manpower, the probe Taichung will also be equipped with ProbeSense™ supporting software to run test scripts for different positions of the chuck at different temperatures. MPI is one of the first probe table manufacturers to offer this feature on its probe tables.
"ProbeSense™ meets the industry's demand for functional, accurate and easy-to-operate calibration tools," said Klemens Reitinger, Chief Technology Officer, ERS electronic. “We firmly believe that the fully automatic ProbeSense™, which has been adopted by several probe station manufacturers, will become a rule rewriter in the fields of precision calibration and temperature uniformity measurement.”
“MPI, which successfully integrates ProbeSense™ into SENTIO® probe stations, sees the obvious advantages of the device: not only intuitive and convenient to operate, but also faster test speeds. Due to its fully automatic characteristics, it also enables continuous calibration at night and weekends, saving production time.” Stojan Kanev, general manager of MPI, said. “The launch of ProbeSense™ is precisely to better meet customers’ needs in cost control and improved work efficiency.”
ERS ProbeSense™ is now accepted.
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