As we all know, there are currently two main types of mainstream lithography machines.
One is EUV lithography machine, also called extreme ultraviolet lithography machine , which is used for chip lithography of 7nm and below. The other is a DUV lithography machine, called the deep ultraviolet lithography machine , which is mainly used for 10-130nm lithography machines. Only ASML can produce it. There are two major routes for
DUV lithography machines. One is the immersion lithography machine represented by ASML, which uses water as the medium and uses light of 193nm wavelength. After refraction in water, it becomes 132nm.
There is also a dry lithography machine, which uses air as the medium and uses light with a wavelength of 157nm, mainly represented by Japan's Nikon and Canon .
Domestic Shanghai Microelectronics also has a DUV lithography machine, which uses an immersion type, but the technology is relatively backward. Although it is also called DUV, it is still at a precision of 90nm.
Compared with EUV lithography machines, DUV is indeed a mature technology. Therefore, DUV lithography machines have always been free. Whether it is ASML, Nikon or Canon, there is no need to obtain the US export license . Can ship DUV lithography systems to Chinese customers.
Therefore, China has been purchasing ASML’s DUV lithography machines in large quantities for chip lithography. Although domestic lithography machines are also used, they are used less frequently. Needless to say the reason.
But the United States has always wanted to deprive us of our DUV freedom. In 2020 and 2021, some U.S. lawmakers have put forward some proposals, saying that the U.S. government needs to cooperate with Japan and the Netherlands to ban the export of DUV equipment to China.
However, there are more objections. ASML, Nikon, and Canon have also refused to do it. They said that DUV is such a mature technology that there is no point in banning it. China has produced it itself, so why bother them to make money? So although there were rumors, it was never implemented.
And yesterday, news came out that some media reported that the United States is pushing the Dutch government to ban ASML from selling some key technologies to mainland China, including DUV lithography machines. At the same time, it was also stated that the U.S. government also plans to put pressure on Japan to prevent Japan's Nikon and Canon from exporting DUV lithography machines to mainland China.
Some netizens were shocked when they saw this, saying this was a full-scale killing move? In fact, as I said before, in the past few years, this has been done once or even several times every year, but so far, it has not been implemented.
On the one hand, DUV is really a mature technology. Even if it is not sold abroad, it can be produced domestically, but it has caused foreign manufacturers to lose the market.
On the other hand, China is already the world's largest semiconductor equipment market. If there are no photolithography machines, the entire production line cannot be built, and other equipment is not easy to sell. So, the United States and Japan have monopoly on equipment and materials. , EDA manufacturers have lost more.
So in theory, it is difficult to take away the freedom of DUV, but even so, domestic lithography machines must be equipped. Not to mention EUV, the accuracy of DUV must be improved to prevent the other party from always putting pressure on you. Then get your own benefits.
